
Publications
Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond
We have made 23 nm period gratings (11.5 nm 1:1 lines and spaces) on diamond substrates using hydrogen silsesquioxane (HSQ) as a resist
We have made 23 nm period gratings (11.5 nm 1:1 lines and spaces) on diamond substrates using hydrogen silsesquioxane (HSQ) as a resist
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