Microfabricated temperature standard based on Johnson noise measurement for the calibration of micro- and nano-thermometers

An instrument for the definition of absolute temperature on the scale of one micron based on the measurement of Johnson noise in a small metallic resistor has been constructed. The instrument uses conventional monolithic amplifiers and signal processing circuitry and a custom sensor fabricated by bulk micromachining and electron-beam lithography. The instrument is simple to use and accurate to better than 1 K over the range 300–600 K following a single point calibration to ambient temperature. The incorporation of an integrated thermocouple as a transfer standard allows the use of the instrument to define temperatures with a 1 K accuracy and a random error of better than 50 mK in a 1 kHz bandwidth, and permits its operation in electrically noisy environments. Extension to the measurement of temperature on a scale much smaller than 1μm1μm is theoretically straightforward. The instrument has been used to calibrate a nano-thermometer (resistancethermometer atomic force microscopy probe) with applications in the temperature measurement of semiconductor devices. Finally the calibration of the system is confirmed by a calorimetric scan on a 100 pL sample of benzophenone.

Dobson, P. S., G. Mills, and J. M. R. Weaver. “Microfabricated temperature standard based on Johnson noise measurement for the calibration of micro-and nano-thermometers.” Review of scientific instruments 76.5 (2005): 054901.

Share this post

Share on facebook
Share on twitter
Share on linkedin
Share on google
Share on pinterest
Share on print
Share on email

Connect with us
Stay informed of our latest innovations, sign up to our newsletter.

How can we help you to bring your project together?