A batch microfabricated scanning thermal microscopy (SThM) probe is presented. The sensor, based on a Pd resistance thermometer is shown to be suitable for calibration and stable for very long periods (> 700 hours). A technique for achieving transformer isolation of the SThM probe is described and shown to be a highly effective route to obtaining calibrated SThM scans of electrically sensitive samples as well as those subject to large bias voltages.
Dobson, P. S., Weaver, J. M., & Mills, G. (2007, October). New methods for calibrated scanning thermal microscopy (SThM). In Sensors, 2007 IEEE (pp. 708-711). IEEE.